產品簡介
關鍵詞：CVD,Coating,Deposition,HDP,PECVD,
Description:
AST Aegis PECVD System provides the complete product line covering the production scale from volume production, pilot production to RD platform for Dielectric and Si-based film deposition.
Aegis PECVD System has served Industry Applications of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device, and AR Coatings.
1) Hard Mask (SiO2)
2) Passivation (SiO2, Si3N4)
3) SiC
4) Dimond-like Coating (DLC)
5) PIN of Thin Film PV
6) Micro-Crystalline Silicon
7) Anti-Reflection (AR) Coating
Features:
Aegis series has system configuration of Plasma Enhanced and HDP High Density Plasma Source for CVD, suitable for wide temperature range and low film stress deposition requirement of different customer application.
Specification:
Standard Chamber Batch System and Multi-Chamber Cluster Platform Available.
Please contact AST for your application.
Safety Approval:
TUV
Country of Origin:
Taiwan
Main Export Markets:
Worldwide
關鍵詞：Adhesive,Anodic,Bonder,Eutectic,Wafer,
Description:
AST Samurai Wafer Bonding System provides the complete product line covering the production scale from volume production, pilot production to RD platform for wafer level bonding application.
Samurai Wafer Bonding System has served Industry Application of worldwide customers from LED, Compound Semiconductor, MEMS, BioChip, Advanced Packaging, and EMI Device.
1) Metal (Eutectic) Bonding
2) Adhesive (Glue, Expoxy)
3) Anodic Bonding
4) Thermal Direct Bonding
5) Alignment Bonding
6) Advanced Packaging Bonding
7) 3D Packaging Bonding
Features:
Samurai series has system configuration for Eutectic, Adhesive, Anodic bonding, with
independent temperature, precise bonding pressure, voltage control and alignment mechanism design suitable for different customer application.
Specification:
Standard Vacuum Model handling wafer size from 2"~8" available.
Please contact AST for your application.
Safety Approval:
TUV
Country of Origin:
Taiwan
Main Export Markets:
Worldwide
關鍵詞：Etch,Etching,Dry,HDP,ICP,Plasma,RIE,TCP,
Description:
AST Chaser Plasma Etcher System provides the complete product line covering the production scale from volume production, pilot production to RD platform.
Aurora Sputter System has served Industry of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device applications.
1) LED / III-V Etching (GaN Mesa, GaAs Via, InP Trench)
2) Pattern Sapphire Substrate (PSS) Etching
3) Photonic Crystal (PhC) Etching
4) Silicon Etching (Deep Si Etching, Bulk Si Etching)
5) Si-based material Etching
6) Polymer Etching
7) Metal Etching
8) Quartz and Single Crystal Material Etching
Features:
Aurora series has system configuration of RIE, ICP, TCP, HDP, High Density Plasma source and Cryogenic Backside Helium Cooling System for substrate temperature control, suitable for different customer application.
Specification:
Standard Single Chamber Batch System and Multi-Chamber Cluster System Available.
Safety Approval:
TUV
Country of Origin:
Taiwan
Main Export Markets:
Worldwide
Please contact AST for your application.
關鍵詞：Plasma,Stripper,Asher,Cleaner,Descum,
Description:
AST Cyclops Plasma Stripper / Descum / Asher / Cleaner System System provides the complete product line covering the production scale from volume production, pilot production to RD platform.
Cyclops System has served Industry of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device applications.
1) PR Strip
2) PR Descum
3) Surface Treatment / Clean / Activation
Features:
Cyclops series has system configuration for Surface Damage Free Process without bambardment effect.
Specification:
Standard Model for Regular Wafer and Large Area Substrate of any Shape Available.
Please contact AST for your application.
Safety Approval:
TUV
Country of Origin:
Taiwan
Main Export Markets:
Worldwide
關鍵詞：DC,Pulse,RF,Sputter,Sputtering,
Description:
AST Aurora Sputter System provides the complete product line covering the production scale from volume production, pilot production to RD platform for Metal and Dielectric film deposition.
Aurora Sputter System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device, TCO, and AR Coatings.
1) Metal Film Deposition
2) Alloy Co-Deposition
3) Dielectric Film Deposition
4) Optical Film Coating
5) Anti-Reflection (AR) Coating
6) TCO Coating
7) Mirror Coating
8) Ohmic Metal Deposition
Features:
Aurora series has system configuration for Upward, Downward, and Vertical sputtering requirement, suitable for different customer application.
Specification:
DC, RF, Pulse DC Power.
Please contact AST for your application.
Safety Approval:
TUV
Country of Origin:
Taiwan
Main Export Markets:Worldwide
關鍵詞：E-gun,Evaporator,Thermal,led,E-beam,
Description:
AST MIDast Evaporator System provides the complete product line covering the production scale from volume production, pilot production to RD platform for Metal and Dielectric film deposition.
MIDast Evaporator System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, EMI Device, TCO, and AR Coatings.
1) Metal Film Deposition
2) Co-Deposition
3) Dielectric Film Deposition
4) Lift-off process
5) TCO (ITO) Deposition
6) DBR Mirrors Stack
7) AR (Anti Reflection) Coating
8) Backside Metal Process
9) High Deposition Rate Application
Features:
MIDast series has system configuration for thermal, e-beam evaporation source and ion beam assist deposition, suitable for different customer application.
Specification:
Standard Chamber Size, Capacity Available.
Please contact AST for your application.Safety Approval:
TUV
Country of Origin:
Taiwan
Main Export Market:
Worldwide
關鍵詞：Crystallin,Ingot,Puller,Silicon,Single,
Description:
AST Doric Slilcon Ingot Puller fits the green industry requirement with high production efficiency. Innovative Precise Growth Control of Crystallization in One-Step saves the energy without consuming extra electricity.
Features:
1) Crystallization in One-Step (Energy Saving)
2) N-type Silicon Ingot Growth (High Efficiency)
3) Intelligency Automation System (Low Cost of Ownership)
Specification:
Please contact AST for your production expansion plan.
Safety Approval:
TUV
Country of Original:
Taiwan
Main Export Markets
Worldwide
關鍵詞：Annealing,Process,RTN,RTP,Rapid,Thermal,
Description:
AST Cheetah RTP / RTA System provides the complete product line covering the production scale from volume production, pilot production to RD platform.
Cheetah RTP / RTA System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, and Touch Panel.
1) Implant Annealing / Activation
2) Alloy
3) PSG/BPSG Reflow
4) Eutectic Reflow
5) Trench Oxidation
6) Gate Dielectric Formation
7) Poly –Si Annealing
8) Ti Silicide / Nitride
Features:
Cheetah series has system configuration for manual, semi, and fully auto system, suitable for different customer application.
Specification:
Standard Model for Manual, Semi-Auto, Fully-Auto, Single and Dual Chamber with Dual Robot Arm Available.
Please contact AST for your application.
Safety Approval:
TUV
Country of Original:
Taiwan
Main Export Markets:
Worldwide
